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For more demanding applications
where the specifications are met through tight manufacturing tolerances and not by individual per die measurements
PtIr Conductive Coating
-- Included in the new MM-SCM-V3 Scanning Capacitance Microscopy solution for MultiMode
This CD calibration test specimen comprises 5 line patterns
Test Grating for Tip Sharpness Hysitron For more demanding applicationsDESCRIPTION The TGTZ 400 test grating is intended for 3 D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control. Structure: Si wafer with grating in top surface Pattern type: Array of sharp tips Tip angle: About 50 degrees Tip Radius: 10nm Tip Height: 0. 3 0. 7m Period: 3 0. 01m Diagonal period: 2. 12m Chip size: 5 x 5 x 0. 5mm Effective area: Central square of 2 x 2mm
